10th International Conference on Modeling and Analysis of Semiconductor Manufacturing 2014

Savannah, Georgia, USA
December 7-10, 2014

Reha UzsoyMASM Keynote
Tuesday, December 9

Reha Uzsoy
Clifton A. Anderson Distinguished Professor
Edwards P. Fitts Dept. of Industrial and Systems Engineering
North Carolina State University

(Almost) Present at the Creation: 25 Years of Modelling and Simulation in Semiconductor Manufacturing
Over the last three decades an extensive research literature on modelling and simulation applications in the semiconductor industry has developed.
Extensive relationships between academic research groups and industry have also been in evidence. This presentation will briefly review the evolution of modelling and analysis research in semiconductor manufacturing from an academic perspective, discuss its implications for academic research and industrial practice, and suggest a number of future directions for research and for more effective industry-university collaboration.

Reha Uzsoy holds BS degrees in Industrial Engineering and Mathematics and an MS in Industrial Engineering from Bogazici University, Istanbul, Turkey. He received his Ph.D in Industrial and Systems Engineering in 1990 from the University of Florida. His teaching and research interests are in production planning and supply chain management. Before coming to the U.S., he worked as a production engineer with Arcelik AS, a major appliance manufacturer in Istanbul, Turkey. He has also been a visiting researcher at Intel Corporation and IC Delco. He was named a Fellow of the Institute of Industrial Engineers in 2005, Outstanding Young Industrial Engineer in Education in 1997, and has received awards for both undergraduate and graduate teaching.



The 2014 International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) aims to again be a forum for the exchange of ideas and best practices between researchers and practitioners from around the world involved in modeling and analysis of high-tech manufacturing systems. We are convinced of the worth and importance of the continuation of the MASM events held in Tempe, Arizona in 2000 and 2002, Singapore in 2005, Miami, Florida in 2008, Austin, Texas in 2009, Baltimore, Maryland in 2010, Phoenix, Arizona in 2011, Berlin in 2012 and Washington, DC in 2013.

The MASM 2014 conference will be fully contained within the Winter Simulation Conference 2014 (WSC 2014), the leading conference in discrete event simulation. WSC 2014 features a comprehensive program ranging from introductory tutorials to state-of-the-art research and practice. WSC 2014 will take place in Savannah, Georgia, USA. All attendees of the MASM conference will register for WSC 2014 at the same cost. All participants of WSC 2014 can attend MASM 2014 sessions.

We are looking for high-quality research at all levels of semiconductor manufacturing. At the operational level, improved equipment and process control and optimized scheduling and transportation policies must be studied. At the tactical level, better capacity planning and qualification management are expected. At the strategic level, demand planning, factory economics and supply chain efficiency must be improved to support the business. Moreover, better integration of decisions taken at different decisions levels is becoming a must. These various goals will be attained through new advanced control and statistical methods, computing techniques and operations research methods. We invite participants to present on all topics related to modeling and analysis that will help address these challenges. While the MASM conference is mostly focused on the current semiconductor industry state-of-the-art, neither presenters nor attendees need to be in the IC industry to participate. We are interested in any methodologies, research, and/or applications from other related industries such as TFT-LCD, flexible displays, bio-chip, solid state lighting (LED) and photovoltaic (PV) that might also share or want to share common and new practices.

The conference includes tutorials and related software demonstrations within the Winter Simulation Conference 2014. A broad range of papers is sought, including theoretical developments, applied research, and case studies. Interested individuals within academia, government agencies, equipment suppliers, manufacturers, students, contractors, and other interested parties are encouraged to participate.

MASM will feature a keynote talk by Reha Uzsoy, Distinguished Professor, Industrial and Systems Engineering, North Carolina State University, Raleigh, USA.

Conference Location: MASM 2014 will be held in beautiful Savannah, Georgia, USA at the Savannah International Trade & Convention Center and the adjacent Westin Savannah Harbor Golf Resort & Spa, the host hotel for WSC 2014. This premiere resort is located in the heart of the historic Savannah River District and combines modern luxury with classic Southern charm. The resort is near to outstanding shopping sites, vibrant nightlife and includes a complimentary water ferry service to River Street. Savannah, Georgia was recognized as one of the top 10 cities in the USA by the 2013 Conde Nast Traveller Magazine. Please visit to learn more.

International Program Committee

Joey Chang, Dow Chemicals
Shi-Chung Chang, National Taiwan University, Taiwan
Argon Chen, National Taiwan University, Taiwan
Fan-Tien Cheng, National Cheng Kung University, Taiwan
Chen-Fu Chien, National Tsing Hua University, Taiwan
Guy Curry, Texas A&M University, USA
Stephane Dauzere-Peres, Ecole des Mines de Saint-Etienne, France
Hans Ehm, Infineon Technologies AG, Germany
Gary Godding , Intel, USA
Andy Ham, Liberty University, USA
Cathal Heavey, University of Limerick, Ireland
Keung Hsu, TSMC, Taiwan
Jesus A.  Jimenez, Texas State University-San Marcos, USA
Baris Kacar, SAS, USA
Adar Kalir, Intel, Israel
DJ Kim, Micron, USA
Andreas Klemmt, Infineon Technologies AG, Germany
Tae-Eog Lee, KAIST, South Korea
Dae-Eun Lim, Baekseok University, South Korea
Kenji Miyake, PMT Corporation, Japan
Devadas Pillai, Intel, USA
Jürgen Pilz, Alpen-Adria University of Klagenfurt, Austria
Thomas Ponsignon, Infineon Technologies AG, Germany
Fei Qiao, Tongji University, China
Oliver Rose, Universität der Bundeswehr München, Germany
Israel Tirkel, Ben-Gurion University, Israel
Gerald Weigert, Dresden University of Technology, Germany
Jei-Zheng Wu, Soochow University, Taiwan
Kan Wu, Nanyang Technological University, Singapore
Claude Yugma, Ecole des Mines de Saint-Etienne, France



Paper Submission

Please follow the WSC 2014 Author Kit to prepare your MASM 2014 paper.

Important Dates

Deadline for Paper Submission: April 1, 2014

Notification of Acceptance: June 2, 2014

Corrected Papers to Editors:   July 2, 2014  

Camera Ready Paper due:
July 16, 2014


Conference Organizers

John Fowler,
University of Arizona

Lars Moench
Fern University
Hagen, Germany

James R. Morrison
KAIST, South Korea